Thin solid films, ‎0040-6090

Journal

ISSNs0040-6090
1 - 50 out of 83Page size: 50

Research output

  1. 2024
  2. Published

    Extracting high-temperature stress–strain curves from a 1.2 μm silicon film using spherical nanoindentation

    Schaffar, G. J. K., Tscharnuter, D., Imrich, P. J. & Maier-Kiener, V., 27 Dec 2024, In: Thin solid films. 809.2025, 1 January, 10 p., 140597.

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Sputter deposited silver niobate thin films: Pathway towards phase purity

    Kölbl, L., Kobald, A., Griesser, T., Munnik, F. & Mitterer, C., 15 Sept 2024, In: Thin solid films. 804.2024, 15 September, 9 p., 140505.

    Research output: Contribution to journal › Article › Research › peer-review

  4. 2023
  5. Published

    Synthesis and mechanical properties of co-deposited W nanoparticle and ZrCuAg metallic glass thin film composites

    Huszar, E., Sharma, A., Székely, L., Raghavan, R., Putz, B., Edwards, T. E. J., Spolenak, R., Michler, J. & Pethö, L., 31 May 2023, In: Thin solid films. 773, 139822.

    Research output: Contribution to journal › Article › Research › peer-review

  6. 2022
  7. Published

    Influence of interlayers on the interfacial behavior of Ag films on polymer substrates

    Cordill, M., Paulitsch, M., Katsarelis, C., Putz, B., Lassnig, A. & Kennedy, M. S., 2022, In: Thin solid films. 742, 139051.

    Research output: Contribution to journal › Article › Research › peer-review

  8. 2021
  9. Published

    Ion irradiation-induced localized stress relaxation in W thin film revealed by cross-sectional X-ray nanodiffraction

    Hlushko, K., Mackova, A., Zalesak, J., Burghammer, M., Davydok, A., Krywka, C., Daniel, R., Keckes, J. & Todt, J., 7 Feb 2021, In: Thin solid films. 722.2021, 31 March, 6 p., 138571.

    Research output: Contribution to journal › Article › Research › peer-review

  10. E-pub ahead of print

    Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers

    Kreiml, P., Rausch, M., Terziyska, V., Köstenbauer, H., Winkler, J., Mitterer, C. & Cordill, M. J., 9 Jan 2021, (E-pub ahead of print) In: Thin solid films. 720.2021, 28 February, 9 p., 138533.

    Research output: Contribution to journal › Article › Research › peer-review

  11. 2020
  12. Published

    Mechanical properties of homogeneous and nitrogen graded TiN thin films

    Silva, F. C., Tunes, M. A., Sagás, J. C., Fontana, L. C., de Lima, N. B. & Schön, C. G., 30 Sept 2020, In: Thin solid films. 710, p. 138268 1 p., 138268.

    Research output: Contribution to journal › Article › Research › peer-review

  13. 2019
  14. Published

    The effect of B and C addition on microstructure and mechanical properties of TiN hard coatings grown by chemical vapor deposition

    Kainz, C., Schalk, N., Tkadletz, M., Mitterer, C. & Czettl, C., 31 Oct 2019, In: Thin solid films. 688.2019, 137283, 8 p., 137283.

    Research output: Contribution to journal › Article › Research › peer-review

  15. Published

    Thermal expansion of magnetron sputtered TiCxN1-x coatings studied by high-temperature X-ray diffraction

    Saringer, C., Kickinger, C., Munnik, F., Mitterer, C., Schalk, N. & Tkadletz, M., 31 Oct 2019, In: Thin solid films. 688.2019, 31 October, 8 p., 137307.

    Research output: Contribution to journal › Article › Research › peer-review

  16. E-pub ahead of print

    Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy

    Saghaeian, F., Keckes, J., Woehlert, S., Rosenthal, M., Reisinger, M. & Todt, J., 14 Oct 2019, (E-pub ahead of print) In: Thin solid films. 691.2019, 1 December, 7 p., 137576.

    Research output: Contribution to journal › Article › Research › peer-review

  17. Published

    Correlation of mechanical damage and electrical behavior of Al/Mo bilayers subjected to bending

    Kreiml, P., Rausch, M., Terziyska, V. L., Köstenbauer, H., Winkler, J., Mitterer, C. & Cordill, M. J., 1 Oct 2019, In: Thin solid films. 687.2019, 1 October, 9 p., 137480.

    Research output: Contribution to journal › Article › Research › peer-review

  18. 2018
  19. Published

    Crack arrest in thin metallic film stacks due to material- and residual stress inhomogeneities

    Kozic, D., Gänser, H.-P., Brunner, R., Kiener, D., Antretter, T. & Kolednik, O., 31 Dec 2018, In: Thin solid films. p. 14-22 9 p.

    Research output: Contribution to journal › Article › Research › peer-review

  20. Published

    Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology

    Mozetic, M., Vesel, A., Primc, G., Eisenmenger-Sittner, C., Bauer, J., Eder, A., Schmid, G. H. S., Ruzic, D. N., Ahmed, Z., Barker, D., Douglass, K. O., Eckel, S., Fedchak, J. A., Hendricks, J., Klimov, N., Ricker, J., Scherschligt, J., Stone, J., Strouse, G. & Capan, I. & 31 others, Buljan, M., Milosevic, S., Teichert, C., Cohen, S. R., Silva, A. G., Lehocky, M., Humpolicek, P., Rodriguez, C., Hernandez-Montelongo, J., Mercier, D., Manso-Silvan, M., Ceccone, G., Galtayries, A., Stana-Kleinschek, K., Petrov, I., Greene, J. E., Avila, J., Chen, C. Y., Caja-Munoz, B., Yi, H., Boury, A., Lorcy, S., Asensio, M. C., Bredin, J., Gans, T., O'Connell, D., Brendin, J., Reniers, F., Vincze, A., Anderle, M. & Montelius, L., 30 Aug 2018, In: Thin solid films. 660, p. 120-160

    Research output: Contribution to journal › Review article › peer-review

  21. Synthesis and characterisation of high-entropy alloy thin films as candidates for coating nuclear fuel cladding alloys

    Tunes, M. A., Vishnyakov, V. M. & Donnelly, S. E., 6 Mar 2018, (E-pub ahead of print) In: Thin solid films. 649.2018, 1 March, p. 115-120 6 p.

    Research output: Contribution to journal › Article › Research › peer-review

  22. Published

    Effects of bias pulse frequencies on reactively sputter deposited NbOx films

    Lorenz, R., O`Sullivan, M., Fian, A., Sprenger, D., Lang, B. & Mitterer, C., 2018, In: Thin solid films. p. 335-342

    Research output: Contribution to journal › Article › Research › peer-review

  23. Published

    Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods

    Kreiml, P., Rausch, M., Terziyska, V., Köstenbauer, H., Winkler, J., Mitterer, C. & Cordill, M., 2018, In: Thin solid films. p. 131-136

    Research output: Contribution to journal › Article › Research › peer-review

  24. Published

    Microstructure and physical properties of sputter-deposited Cu-Mo thin films

    Souli, I., Terziyska, V., Zechner, J. & Mitterer, C., 2018, In: Thin solid films. p. 301-308

    Research output: Contribution to journal › Article › Research › peer-review

  25. 2017
  26. E-pub ahead of print

    Microstructural influence on the cyclic electro-mechanical behaviour of ductile films on polymer substrates

    Cordill, M., Glushko, O., Kleinbichler, A., Putz, B., Többens, D. & Kirchlechner, C., 17 Sept 2017, (E-pub ahead of print) In: Thin solid films. 644.2017, 31. December, p. 166-172 7 p.

    Research output: Contribution to journal › Article › Research › peer-review

  27. E-pub ahead of print

    Effect of annealing on the size dependent deformation behavior of thin cobalt films on flexible substrates

    Marx, V. M., Cordill, M., Többens, D., Kirchlechner, C. & Dehm, G., 10 Jan 2017, (E-pub ahead of print) In: Thin solid films. 624.2017, 28 February, p. 34-40 7 p.

    Research output: Contribution to journal › Article › Research › peer-review

  28. 2016
  29. Published

    Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizations

    Bigl, S., Wurster, S., Cordill, M. & Kiener, D., 1 Aug 2016, In: Thin solid films. 612.2016, 1 August, p. 153-164 12 p.

    Research output: Contribution to journal › Article › Research › peer-review

  30. Published

    Structure and properties of sputter deposited crystalline and amorphous Cu-Ti films

    Turnow, H., Wendrock, H., Menzel, S., Gemming, T. & Eckert, J., 1 Jan 2016, In: Thin solid films. 598, p. 184-188 5 p.

    Research output: Contribution to journal › Article › Research › peer-review

  31. Published

    Improvement of oxidation and corrosion resistance of Mo thin films by alloying with Ta

    Hofer-Roblyek, A. M., Mori, G., Fian, A., Winkler, J. & Mitterer, C., 2016, In: Thin solid films. 599, p. 1-6 6 p.

    Research output: Contribution to journal › Article › Research › peer-review

  32. Published

    Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

    Riedl, H., Munnik, F., Hutter, H., Mendez Martin, F., Kolozsvari, S., Bartosik, M., Mayrhofer, P. H., Koller, C. & Rachbauer, R., 2016, In: Thin solid films. 603, p. 39-49 10 p.

    Research output: Contribution to journal › Article › Research › peer-review

  33. Published

    The electro-mechanical behavior of sputter- deposited Mo thin films on flexible substrates

    Jörg, T., Cordill, M., Franz, R., Glushko, O., Winkler, J. & Mitterer, C., 2016, In: Thin solid films. 606, p. 45-50 6 p.

    Research output: Contribution to journal › Article › Research › peer-review

  34. 2015
  35. Published

    Effect of wavelength modulation of arc evaporated Ti-Al-N/Ti-Al-V-N multilayer coatings on microstructure and mechanical/tribological properties

    Pfeiler-Deutschmann, M., Mayrhofer, P. H., Chladil, K., Penoy, M., Michotte, C., Kathrein, M. & Mitterer, C., 1 Jan 2015, In: Thin solid films. 581, p. 20-24 5 p.

    Research output: Contribution to journal › Article › Research › peer-review

  36. Published

    Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2015, In: Thin solid films. 574, p. 103-109

    Research output: Contribution to journal › Article › Research › peer-review

  37. Published

    Nanoindentation of chemical-vapor deposited Al2O3 hard coatings at elevated temperatures

    Rebelo De Figueiredo, M., Abad, M. D., Harris, A. J., Czettl, C., Mitterer, C. & Hosemann, P., 2015, In: Thin solid films. 578, p. 20-24

    Research output: Contribution to journal › Article › Research › peer-review

  38. Published

    Resolving depth evolution of microstructure and hardness in sputtered CrN film

    Zeilinger, A., Daniel, R., Schöberl, T., Stefenelli, M., Sartory, B., Keckes, J. & Mitterer, C., 2015, In: Thin solid films. 581.2015, April, p. 75-79

    Research output: Contribution to journal › Article › Research › peer-review

  39. 2014
  40. Published

    Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method

    Schöngrundner, R., Treml, R., Antretter, T., Kozic, D., Ecker, W. & Kiener, D., 2014, In: Thin solid films. p. 321-330

    Research output: Contribution to journal › Article › Research › peer-review

  41. Published

    Ductile film delamination from compliant substrates using hard overlayers

    Cordill, M. J., Marx, V. M. & Kirchlechner, C., 2014, In: Thin solid films. 571, p. 302-307

    Research output: Contribution to journal › Article › Research › peer-review

  42. Published

    High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

    Jilek, Jr., M., Jilek,, M., Mendez Martin, F., Mayrhofer, P. H. & Veprek, S., 2014, In: Thin solid films. 556, p. 361-368

    Research output: Contribution to journal › Article › Research › peer-review

  43. Published

    Recovery of electrical resistance in copper films on polyethylene terephthalate subjected to a tensile strain

    Glushko, O., Marx, V. M., Kirchlechner, C., Zizak, I. & Cordill, M. J., 2014, In: Thin solid films. 552, p. 141-145

    Research output: Contribution to journal › Article › Research › peer-review

  44. Published

    Seed layer stimulated growth of crystalline high Al containing (Al,Cr)2O3 coatings deposited by cathodic arc evaporation

    Pohler, M., Franz, R., Ramm, J., Polcik, P. & Mitterer, C., 2014, In: Thin solid films. 550, p. 95-104

    Research output: Contribution to journal › Article › Research › peer-review

  45. Published

    The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

    Chawla, V., Holec, D. & Mayrhofer, P., 2014, In: Thin solid films. 565, p. 94-100

    Research output: Contribution to journal › Article › Research › peer-review

  46. 2013
  47. Published

    Cross-sectional X-ray nanobeam diffraction analysis of a compositionally graded CrNx thin film

    Bartosik, M., Daniel, R., Mitterer, C., Matko, I., Burghammer, M., Mayrhofer, P. H. & Keckes, J., 2013, In: Thin solid films. 542, p. 1-4

    Research output: Contribution to journal › Article › Research › peer-review

  48. Published

    Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Lechthaler, M., Pocik, P. & Mitterer, C., 2013, In: Thin solid films. 534, p. 403-409

    Research output: Contribution to journal › Article › Research › peer-review

  49. Published

    Influence of AlN layers on mechanical properties and thermal stability of Cr-based nitride coatings

    Schlögl, M., Paulitsch, J., Keckes, J. & Mayrhofer, P. H., 2013, In: Thin solid films. 531, p. 113-118

    Research output: Contribution to journal › Article › Research › peer-review

  50. Published

    Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

    Schlögl, M., Mayer, B., Paulitsch, J. & Mayrhofer, P., 2013, In: Thin solid films. 545, p. 375-379

    Research output: Contribution to journal › Article › Research › peer-review

  51. Published

    Microstructure and thermal stability of corundum-type (Al0.5Cr0.5)2O3 solid solution coatings grown by cathodic arc evaporation

    Edlmayr, V., Pohler, M., Letovsky-Papst, I. & Mitterer, C., 2013, In: Thin solid films. 534, p. 373-379

    Research output: Contribution to journal › Article › Research › peer-review

  52. Published

    Self-organized periodic soft-hard nanolamellae in polycrystalline TiAlN thin films

    Keckes, J., Daniel, R., Mitterer, C., Matko, I., Sartory, B., Köpf, A., Weißenbacher, R. & Pitonak, R., 2013, In: Thin solid films. 545, p. 29-32

    Research output: Contribution to journal › Article › Research › peer-review

  53. Published

    Transmission electron microscopy characterization of CrN films on MgO(001)

    Harzer, T. P., Daniel, R., Mitterer, C., Dehm, G. & Zhang, Z. L., 2013, In: Thin solid films. 545, p. 154-160 7 p.

    Research output: Contribution to journal › Article › Research › peer-review

  54. 2012
  55. Published

    Patterned immobilisation of silicon dioxide nanoparticles on the surface of a photosensitive polymer

    Muhr, N., Kern, W. & Grießer, T., 2012, In: Thin solid films. 520, p. 1789-1793

    Research output: Contribution to journal › Article › Research › peer-review

  56. Published

    Self-assembling (nano-)wrinkling topography formation in low-temperature vacuum deposition on soft polymer surfaces

    Lackner, J., Waldhauser, W., Hartmann, P., Miskovics, O., Schmied, F., Teichert, C. & Schöberl, T., 2012, In: Thin solid films. 520, p. 2833-2840

    Research output: Contribution to journal › Article › Research › peer-review

  57. 2011
  58. Published

    Influence of Zr on structure, mechanical and thermal properties of Ti-Al-N

    Chen, L., Holec, D., Du, Y. & Mayrhofer, P. H., 2011, In: Thin solid films. 519, p. 5503-5510

    Research output: Contribution to journal › Article › Research › peer-review

  59. Published

    Oxidation and diffusion study on AlCrVN hard coatings using oxygen isotopes 16O and 18O

    Franz, R., Schnöller, J., Hutter, H. & Mitterer, C., 2011, In: Thin solid films. 519, p. 3974-3981

    Research output: Contribution to journal › Article › Research › peer-review

  60. 2010
  61. Published

    Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

    Paulitsch, J., Schenkel, M., Schintlmeister, A., Hutter, H. & Mayrhofer, P. H., 2010, In: Thin solid films. 518, p. 5553-5557

    Research output: Contribution to journal › Article › Research › peer-review

  62. Published

    Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

    Matoy, K., Schönherr, H., Detzel, T. & Dehm, G., 2010, In: Thin solid films. 518, p. 5796-5801

    Research output: Contribution to journal › Article › Research › peer-review

  63. Published

    Morphology characterization and friction coefficient determination of sputtered V2O5 films

    Klünsner, T., Shen, Q., Hlawacek, G., Teichert, C., Fateh, N., Fontalvo, G. & Mitterer, C., 2010, In: Thin solid films. 519, p. 1416-1420

    Research output: Contribution to journal › Article › Research › peer-review

  64. Published

    Residual stresses and thermal fatigue in CrN hard coatings characterized by high-temperature synchrotron X-ray diffraction

    Kirchlechner, C., Martinschitz, K. J., Daniel, R., Klaus, M., Genzel, C., Mitterer, C. & Keckes, J., 2010, In: Thin solid films. 518, 8, p. 2090-2096

    Research output: Contribution to journal › Article › Research › peer-review

  65. Published

    Structural characterization of a Cu/MgO(001) interface using C S-corrected HRTEM

    Cazottes, S., Zhang, Z. L., Daniel, R., Chawla, J. S., Gall, D. & Dehm, G., 2010, In: Thin solid films.

    Research output: Contribution to journal › Article › Research › peer-review

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