Nanoindentation of chemical-vapor deposited Al₂O₃ hard coatings at elevated temperatures

Research output: Contribution to journal › Article › Research › peer-review

Authors

Manuel D. Abad
Adrian J. Harris
Christoph Czettl
Peter Hosemann

Organisational units

Chair of Functional Materials and Materials Systems (425)

External Organisational units

Department of Nuclear Engineering, University of California Berkeley
Micro Materials Ltd.
Ceratizit Austria GmbH

Details

Original language	English
Pages (from-to)	20-24
Journal	Thin solid films
Volume	578
DOIs	https://doi.org/10.1016/j.tsf.2015.01.069
Publication status	Published - 2015

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