Nanoindentation of chemical-vapor deposited Al2O3 hard coatings at elevated temperatures
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Department of Nuclear Engineering, University of California Berkeley
- Micro Materials Ltd.
- Ceratizit Austria GmbH
Details
Original language | English |
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Pages (from-to) | 20-24 |
Journal | Thin solid films |
Volume | 578 |
DOIs | |
Publication status | Published - 2015 |