Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Research output: Contribution to journal › Article › Research › peer-review

Authors

Translated title of the contribution	Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Original language	English
Pages (from-to)	103-109
Journal	Thin solid films
Volume	574
DOIs	https://doi.org/10.1016/j.tsf2014.11.084
Publication status	Published - 2015