Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Research output: Contribution to journal › Article › Research › peer-review
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Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, B. et al.
In: Thin solid films, Vol. 574, 2015, p. 103-109.
In: Thin solid films, Vol. 574, 2015, p. 103-109.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Mühlbacher, M, Mendez Martin, F, Sartory, B, Schalk, N, Keckes, J, Lu, J, Hultman, L & Mitterer, C 2015, 'Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography', Thin solid films, vol. 574, pp. 103-109. https://doi.org/10.1016/j.tsf2014.11.084
APA
Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L., & Mitterer, C. (2015). Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography. Thin solid films, 574, 103-109. https://doi.org/10.1016/j.tsf2014.11.084
Vancouver
Mühlbacher M, Mendez Martin F, Sartory B, Schalk N, Keckes J, Lu J et al. Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography. Thin solid films. 2015;574:103-109. doi: 10.1016/j.tsf2014.11.084
Author
Bibtex - Download
@article{c95ea5d22b1241fba346e985247def40,
title = "Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and Nina Schalk and Jozef Keckes and J. Lu and L. Hultman and Christian Mitterer",
year = "2015",
doi = "10.1016/j.tsf2014.11.084",
language = "English",
volume = "574",
pages = "103--109",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, B.
AU - Schalk, Nina
AU - Keckes, Jozef
AU - Lu, J.
AU - Hultman, L.
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
U2 - 10.1016/j.tsf2014.11.084
DO - 10.1016/j.tsf2014.11.084
M3 - Article
VL - 574
SP - 103
EP - 109
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
