Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Thin solid films, Jahrgang 574, 2015, S. 103-109.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, B.
AU - Schalk, Nina
AU - Keckes, Jozef
AU - Lu, J.
AU - Hultman, L.
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
U2 - 10.1016/j.tsf2014.11.084
DO - 10.1016/j.tsf2014.11.084
M3 - Article
VL - 574
SP - 103
EP - 109
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -