Effects of bias pulse frequencies on reactively sputter deposited NbOx films
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- PLANSEE SE
- Institute of Nanostructured Materials and Photonics, Joanneum Research
Details
| Original language | English |
|---|---|
| Pages (from-to) | 335-342 |
| Journal | Thin solid films |
| DOIs | |
| Publication status | Published - 2018 |
