Effects of bias pulse frequencies on reactively sputter deposited NbO_x films

Research output: Contribution to journal › Article › Research › peer-review

Authors

M. O`Sullivan
Alexander Fian
D. Sprenger
Bernhard Lang

Organisational units

Chair of Functional Materials and Materials Systems (425)

External Organisational units

PLANSEE SE
Institute of Nanostructured Materials and Photonics, Joanneum Research

Details

Original language	English
Pages (from-to)	335-342
Journal	Thin solid films
DOIs	https://doi.org/10.1016/j.tsf.2018.06.040
Publication status	Published - 2018

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