A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • M. O`Sullivan
  • Alexander Fian
  • D. Sprenger
  • Bernhard Lang

External Organisational units

  • Institute of Nanostructured Materials and Photonics, Joanneum Research
  • PLANSEE SE

Details

Original languageEnglish
Pages (from-to)1157-1162
JournalApplied surface science
DOIs
Publication statusPublished - 2018