Resolving depth evolution of microstructure and hardness in sputtered CrN film
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
- Materials Center Leoben Forschungs GmbH
Details
Original language | English |
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Pages (from-to) | 75-79 |
Journal | Thin solid films |
Volume | 581.2015 |
Issue number | April |
DOIs | |
Publication status | Published - 2015 |