Resolving depth evolution of microstructure and hardness in sputtered CrN film

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • Angelika Zeilinger
  • Thomas Schöberl
  • Mario Stefenelli
  • Bernhard Sartory

External Organisational units

  • Erich Schmid Institute of Materials Science
  • Materials Center Leoben Forschungs GmbH

Details

Original languageEnglish
Pages (from-to)75-79
JournalThin solid films
Volume581.2015
Issue numberApril
DOIs
Publication statusPublished - 2015