Resolving depth evolution of microstructure and hardness in sputtered CrN film

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Autoren

  • Angelika Zeilinger
  • Mario Stefenelli
  • Bernhard Sartory

Externe Organisationseinheiten

  • Materials Center Leoben Forschungs GmbH
  • Erich-Schmid-Institut für Materialwissenschaft der Österreichischen Akademie der Wissenschaften

Abstract

Hardness and elastic modulus of a sputtered nanocrystalline CrN thin film, prepared under varying ion bombardment conditions, were studied by nanoindentation using a depth-profiling technique and related to cross-sectional X-ray nanodiffraction data on the local microstructure. Changes in texture are shown to have almost no effect on the elastic modulus due to the isotropic response of the polycrystals. However, the locally varying growth conditions, which affect the crystal size and the number of defects in the film, determine the hardness values across the film thickness. Regions with highly distorted small crystals result in higher hardness in comparison with those with well-developed coarsened grains. This study confirms the notion of the existence of growth-related hardness gradients in single-phase nanocrystalline thin films.

Details

OriginalspracheEnglisch
Seiten (von - bis)75-79
Seitenumfang5
FachzeitschriftThin solid films
Jahrgang581.2015
AusgabenummerApril
DOIs
StatusVeröffentlicht - 6 Nov. 2014