Resolving depth evolution of microstructure and hardness in sputtered CrN film
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Autoren
Organisationseinheiten
Externe Organisationseinheiten
- Materials Center Leoben Forschungs GmbH
- Erich-Schmid-Institut für Materialwissenschaft der Österreichischen Akademie der Wissenschaften
Abstract
Hardness and elastic modulus of a sputtered nanocrystalline CrN thin film, prepared under varying ion bombardment conditions, were studied by nanoindentation using a depth-profiling technique and related to cross-sectional X-ray nanodiffraction data on the local microstructure. Changes in texture are shown to have almost no effect on the elastic modulus due to the isotropic response of the polycrystals. However, the locally varying growth conditions, which affect the crystal size and the number of defects in the film, determine the hardness values across the film thickness. Regions with highly distorted small crystals result in higher hardness in comparison with those with well-developed coarsened grains. This study confirms the notion of the existence of growth-related hardness gradients in single-phase nanocrystalline thin films.
Details
Originalsprache | Englisch |
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Seiten (von - bis) | 75-79 |
Seitenumfang | 5 |
Fachzeitschrift | Thin solid films |
Jahrgang | 581.2015 |
Ausgabenummer | April |
DOIs | |
Status | Veröffentlicht - 6 Nov. 2014 |