Resolving depth evolution of microstructure and hardness in sputtered CrN film
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in: Thin solid films, Jahrgang 581.2015, Nr. April, 06.11.2014, S. 75-79.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Resolving depth evolution of microstructure and hardness in sputtered CrN film
AU - Zeilinger, Angelika
AU - Daniel, Rostislav
AU - Schöberl, Thomas
AU - Stefenelli, Mario
AU - Sartory, Bernhard
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2014/11/6
Y1 - 2014/11/6
N2 - Hardness and elastic modulus of a sputtered nanocrystalline CrN thin film, prepared under varying ion bombardment conditions, were studied by nanoindentation using a depth-profiling technique and related to cross-sectional X-ray nanodiffraction data on the local microstructure. Changes in texture are shown to have almost no effect on the elastic modulus due to the isotropic response of the polycrystals. However, the locally varying growth conditions, which affect the crystal size and the number of defects in the film, determine the hardness values across the film thickness. Regions with highly distorted small crystals result in higher hardness in comparison with those with well-developed coarsened grains. This study confirms the notion of the existence of growth-related hardness gradients in single-phase nanocrystalline thin films.
AB - Hardness and elastic modulus of a sputtered nanocrystalline CrN thin film, prepared under varying ion bombardment conditions, were studied by nanoindentation using a depth-profiling technique and related to cross-sectional X-ray nanodiffraction data on the local microstructure. Changes in texture are shown to have almost no effect on the elastic modulus due to the isotropic response of the polycrystals. However, the locally varying growth conditions, which affect the crystal size and the number of defects in the film, determine the hardness values across the film thickness. Regions with highly distorted small crystals result in higher hardness in comparison with those with well-developed coarsened grains. This study confirms the notion of the existence of growth-related hardness gradients in single-phase nanocrystalline thin films.
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84926255740&partnerID=MN8TOARS
U2 - 10.1016/j.tsf.2014.10.106
DO - 10.1016/j.tsf.2014.10.106
M3 - Article
VL - 581.2015
SP - 75
EP - 79
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
IS - April
ER -
