Resolving depth evolution of microstructure and hardness in sputtered CrN film

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Resolving depth evolution of microstructure and hardness in sputtered CrN film. / Zeilinger, Angelika; Daniel, Rostislav; Schöberl, Thomas et al.
in: Thin solid films, Jahrgang 581.2015, Nr. April, 2015, S. 75-79.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Zeilinger A, Daniel R, Schöberl T, Stefenelli M, Sartory B, Keckes J et al. Resolving depth evolution of microstructure and hardness in sputtered CrN film. Thin solid films. 2015;581.2015(April):75-79. doi: 10.1016/j.tsf.2014.10.106, dx.doi.org/10.1016/j.tsf.2014.10.106

Author

Zeilinger, Angelika ; Daniel, Rostislav ; Schöberl, Thomas et al. / Resolving depth evolution of microstructure and hardness in sputtered CrN film. in: Thin solid films. 2015 ; Jahrgang 581.2015, Nr. April. S. 75-79.

Bibtex - Download

@article{91b993b3fca54a37b2e29d8ec7b22d08,
title = "Resolving depth evolution of microstructure and hardness in sputtered CrN film",
author = "Angelika Zeilinger and Rostislav Daniel and Thomas Sch{\"o}berl and Mario Stefenelli and Bernhard Sartory and Jozef Keckes and Christian Mitterer",
year = "2015",
doi = "10.1016/j.tsf.2014.10.106",
language = "English",
volume = "581.2015",
pages = "75--79",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
number = "April",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Resolving depth evolution of microstructure and hardness in sputtered CrN film

AU - Zeilinger, Angelika

AU - Daniel, Rostislav

AU - Schöberl, Thomas

AU - Stefenelli, Mario

AU - Sartory, Bernhard

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84926255740&partnerID=MN8TOARS

U2 - 10.1016/j.tsf.2014.10.106

DO - 10.1016/j.tsf.2014.10.106

M3 - Article

VL - 581.2015

SP - 75

EP - 79

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

IS - April

ER -