Resolving depth evolution of microstructure and hardness in sputtered CrN film
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Thin solid films, Jahrgang 581.2015, Nr. April, 2015, S. 75-79.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Resolving depth evolution of microstructure and hardness in sputtered CrN film
AU - Zeilinger, Angelika
AU - Daniel, Rostislav
AU - Schöberl, Thomas
AU - Stefenelli, Mario
AU - Sartory, Bernhard
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84926255740&partnerID=MN8TOARS
U2 - 10.1016/j.tsf.2014.10.106
DO - 10.1016/j.tsf.2014.10.106
M3 - Article
VL - 581.2015
SP - 75
EP - 79
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
IS - April
ER -