Resolving depth evolution of microstructure and hardness in sputtered CrN film
Research output: Contribution to journal › Article › Research › peer-review
Standard
Resolving depth evolution of microstructure and hardness in sputtered CrN film. / Zeilinger, Angelika; Daniel, Rostislav; Schöberl, Thomas et al.
In: Thin solid films, Vol. 581.2015, No. April, 2015, p. 75-79.
In: Thin solid films, Vol. 581.2015, No. April, 2015, p. 75-79.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Zeilinger, A, Daniel, R, Schöberl, T, Stefenelli, M, Sartory, B, Keckes, J & Mitterer, C 2015, 'Resolving depth evolution of microstructure and hardness in sputtered CrN film', Thin solid films, vol. 581.2015, no. April, pp. 75-79. https://doi.org/10.1016/j.tsf.2014.10.106, https://doi.org/dx.doi.org/10.1016/j.tsf.2014.10.106
APA
Zeilinger, A., Daniel, R., Schöberl, T., Stefenelli, M., Sartory, B., Keckes, J., & Mitterer, C. (2015). Resolving depth evolution of microstructure and hardness in sputtered CrN film. Thin solid films, 581.2015(April), 75-79. https://doi.org/10.1016/j.tsf.2014.10.106, https://doi.org/dx.doi.org/10.1016/j.tsf.2014.10.106
Vancouver
Zeilinger A, Daniel R, Schöberl T, Stefenelli M, Sartory B, Keckes J et al. Resolving depth evolution of microstructure and hardness in sputtered CrN film. Thin solid films. 2015;581.2015(April):75-79. doi: 10.1016/j.tsf.2014.10.106, dx.doi.org/10.1016/j.tsf.2014.10.106
Author
Bibtex - Download
@article{91b993b3fca54a37b2e29d8ec7b22d08,
title = "Resolving depth evolution of microstructure and hardness in sputtered CrN film",
author = "Angelika Zeilinger and Rostislav Daniel and Thomas Sch{\"o}berl and Mario Stefenelli and Bernhard Sartory and Jozef Keckes and Christian Mitterer",
year = "2015",
doi = "10.1016/j.tsf.2014.10.106",
language = "English",
volume = "581.2015",
pages = "75--79",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
number = "April",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Resolving depth evolution of microstructure and hardness in sputtered CrN film
AU - Zeilinger, Angelika
AU - Daniel, Rostislav
AU - Schöberl, Thomas
AU - Stefenelli, Mario
AU - Sartory, Bernhard
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84926255740&partnerID=MN8TOARS
U2 - 10.1016/j.tsf.2014.10.106
DO - 10.1016/j.tsf.2014.10.106
M3 - Article
VL - 581.2015
SP - 75
EP - 79
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
IS - April
ER -
