Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizations
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Pages (from-to) | 153-164 |
| Number of pages | 12 |
| Journal | Thin solid films |
| Volume | 612.2016 |
| Issue number | 1 August |
| DOIs | |
| Publication status | Published - 1 Aug 2016 |
