Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
Details
Original language | English |
---|---|
Pages (from-to) | 110-118 |
Number of pages | 9 |
Journal | Microelectronic engineering |
Volume | 167.2017 |
Issue number | 5 January |
Early online date | 16 Dec 2016 |
DOIs | |
Publication status | Published - 5 Jan 2017 |