Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating

Research output: Contribution to journalArticleResearchpeer-review

Organisational units

External Organisational units

  • Erich Schmid Institute of Materials Science

Details

Original languageEnglish
Pages (from-to)110-118
Number of pages9
JournalMicroelectronic engineering
Volume167.2017
Issue number5 January
Early online date16 Dec 2016
DOIs
Publication statusPublished - 5 Jan 2017