Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films
Research output: Contribution to journal › Article › Research › peer-review
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External Organisational units
- Institute of Materials Science and Technology
Details
| Original language | English |
|---|---|
| Pages (from-to) | 39-49 |
| Number of pages | 10 |
| Journal | Thin solid films |
| Volume | 603 |
| DOIs | |
| Publication status | Published - 2016 |
