Cross-sectional X-ray nanobeam diffraction analysis of a compositionally graded CrNx thin film

Research output: Contribution to journal › Article › Research › peer-review

Authors

Translated title of the contribution	Cross-sectional X-ray nanobeam diffraction analysis of a compositionally graded CrNx thin film
Original language	English
Pages (from-to)	1-4
Journal	Thin solid films
Volume	542
DOIs	https://doi.org/10.1016/j.tsf.2013.05.102
Publication status	Published - 2013