Structure and properties of sputter deposited crystalline and amorphous Cu-Ti films

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • H. Turnow
  • H. Wendrock
  • S. Menzel
  • T. Gemming
  • J. Eckert

Organisational units

External Organisational units

  • Leibniz Institute for Solid State and Materials Research, Dresden
  • Erich Schmid Institute of Materials Science

Details

Original languageEnglish
Pages (from-to)184-188
Number of pages5
JournalThin solid films
Volume598
DOIs
Publication statusPublished - 1 Jan 2016