High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

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Authors

Translated title of the contribution	High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Original language	English
Pages (from-to)	361-368
Journal	Thin solid films
Volume	556
DOIs	https://doi.org/10.1016/j.tsf.2014.01.059
Publication status	Published - 2014