High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Research output: Contribution to journal › Article › Research › peer-review
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High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering. / Jilek, Jr., M.; Jilek, M.; Mendez Martin, Francisca et al.
In: Thin solid films, Vol. 556, 2014, p. 361-368.
In: Thin solid films, Vol. 556, 2014, p. 361-368.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Jilek, Jr., M, Jilek, M, Mendez Martin, F, Mayrhofer, PH & Veprek, S 2014, 'High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering', Thin solid films, vol. 556, pp. 361-368. https://doi.org/10.1016/j.tsf.2014.01.059
APA
Jilek, Jr., M., Jilek, M., Mendez Martin, F., Mayrhofer, P. H., & Veprek, S. (2014). High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering. Thin solid films, 556, 361-368. https://doi.org/10.1016/j.tsf.2014.01.059
Vancouver
Jilek, Jr. M, Jilek, M, Mendez Martin F, Mayrhofer PH, Veprek S. High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering. Thin solid films. 2014;556:361-368. doi: 10.1016/j.tsf.2014.01.059
Author
Bibtex - Download
@article{3a16781bfa1747faaceeec9b48369ae1,
title = "High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering",
author = "{Jilek, Jr.}, M. and M. Jilek, and {Mendez Martin}, Francisca and P.H. Mayrhofer and S. Veprek",
year = "2014",
doi = "10.1016/j.tsf.2014.01.059",
language = "English",
volume = "556",
pages = "361--368",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
AU - Jilek, Jr., M.
AU - Jilek,, M.
AU - Mendez Martin, Francisca
AU - Mayrhofer, P.H.
AU - Veprek, S.
PY - 2014
Y1 - 2014
U2 - 10.1016/j.tsf.2014.01.059
DO - 10.1016/j.tsf.2014.01.059
M3 - Article
VL - 556
SP - 361
EP - 368
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
