High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

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High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering. / Jilek, Jr., M.; Jilek, M.; Mendez Martin, Francisca et al.
in: Thin solid films, Jahrgang 556, 2014, S. 361-368.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{3a16781bfa1747faaceeec9b48369ae1,
title = "High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering",
author = "{Jilek, Jr.}, M. and M. Jilek, and {Mendez Martin}, Francisca and P.H. Mayrhofer and S. Veprek",
year = "2014",
doi = "10.1016/j.tsf.2014.01.059",
language = "English",
volume = "556",
pages = "361--368",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

AU - Jilek, Jr., M.

AU - Jilek,, M.

AU - Mendez Martin, Francisca

AU - Mayrhofer, P.H.

AU - Veprek, S.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.01.059

DO - 10.1016/j.tsf.2014.01.059

M3 - Article

VL - 556

SP - 361

EP - 368

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -