Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

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Authors

Translated title of the contribution	Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices
Original language	English
Pages (from-to)	375-379
Journal	Thin solid films
Volume	545
DOIs	https://doi.org/10.1016/j.tsf.2013.07.026
Publication status	Published - 2013