Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

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Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices. / Schlögl, Manfred; Mayer, Bernhard; Paulitsch, J. et al.
In: Thin solid films, Vol. 545, 2013, p. 375-379.

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@article{b04d37a152544ed88e1eb65ed4305f09,
title = "Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices",
author = "Manfred Schl{\"o}gl and Bernhard Mayer and J. Paulitsch and P. Mayrhofer",
year = "2013",
doi = "10.1016/j.tsf.2013.07.026",
language = "English",
volume = "545",
pages = "375--379",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

AU - Schlögl, Manfred

AU - Mayer, Bernhard

AU - Paulitsch, J.

AU - Mayrhofer, P.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.tsf.2013.07.026

DO - 10.1016/j.tsf.2013.07.026

M3 - Article

VL - 545

SP - 375

EP - 379

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -