Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

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Translated title of the contribution	Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
Original language	English
Pages (from-to)	5553-5557
Journal	Thin solid films
Volume	518
DOIs	https://doi.org/10.1016/j.tsf.2010.05.061
Publication status	Published - 2010