Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
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| Translated title of the contribution | Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings |
|---|---|
| Original language | English |
| Pages (from-to) | 29-32 |
| Journal | Vacuum |
| Volume | 100 |
| DOIs | |
| Publication status | Published - 2014 |
