Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

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Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique. / Paulitsch, Jörg; Schenkel, M.; Schintlmeister, A. et al.
In: Thin solid films, Vol. 518, 2010, p. 5553-5557.

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@article{27f7e93177c14062a30efbf787972582,
title = "Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique",
author = "J{\"o}rg Paulitsch and M. Schenkel and A. Schintlmeister and H. Hutter and Mayrhofer, {Paul Heinz}",
year = "2010",
doi = "10.1016/j.tsf.2010.05.061",
language = "English",
volume = "518",
pages = "5553--5557",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

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TY - JOUR

T1 - Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

AU - Paulitsch, Jörg

AU - Schenkel, M.

AU - Schintlmeister, A.

AU - Hutter, H.

AU - Mayrhofer, Paul Heinz

PY - 2010

Y1 - 2010

U2 - 10.1016/j.tsf.2010.05.061

DO - 10.1016/j.tsf.2010.05.061

M3 - Article

VL - 518

SP - 5553

EP - 5557

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -