Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
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In: Thin solid films, Vol. 518, 2010, p. 5553-5557.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
AU - Paulitsch, Jörg
AU - Schenkel, M.
AU - Schintlmeister, A.
AU - Hutter, H.
AU - Mayrhofer, Paul Heinz
PY - 2010
Y1 - 2010
U2 - 10.1016/j.tsf.2010.05.061
DO - 10.1016/j.tsf.2010.05.061
M3 - Article
VL - 518
SP - 5553
EP - 5557
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -