The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

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Translated title of the contribution	The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices
Original language	English
Pages (from-to)	94-100
Journal	Thin solid films
Volume	565
DOIs	https://doi.org/10.1016/j.tsf.2014.06.051
Publication status	Published - 2014