Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers
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| Translated title of the contribution | Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers |
|---|---|
| Original language | English |
| Pages (from-to) | 5796-5801 |
| Journal | Thin solid films |
| Volume | 518 |
| Publication status | Published - 2010 |
