Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers
Research output: Contribution to journal › Article › Research › peer-review
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Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. / Matoy, Kurt; Schönherr, H.; Detzel, Thomas et al.
In: Thin solid films, Vol. 518, 2010, p. 5796-5801.
In: Thin solid films, Vol. 518, 2010, p. 5796-5801.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Matoy, K, Schönherr, H, Detzel, T & Dehm, G 2010, 'Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers', Thin solid films, vol. 518, pp. 5796-5801.
APA
Matoy, K., Schönherr, H., Detzel, T., & Dehm, G. (2010). Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin solid films, 518, 5796-5801.
Vancouver
Matoy K, Schönherr H, Detzel T, Dehm G. Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin solid films. 2010;518:5796-5801.
Author
Bibtex - Download
@article{92761a771fc547e69f31e2d34db6d76b,
title = "Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers",
author = "Kurt Matoy and H. Sch{\"o}nherr and Thomas Detzel and Gerhard Dehm",
year = "2010",
language = "English",
volume = "518",
pages = "5796--5801",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers
AU - Matoy, Kurt
AU - Schönherr, H.
AU - Detzel, Thomas
AU - Dehm, Gerhard
PY - 2010
Y1 - 2010
M3 - Article
VL - 518
SP - 5796
EP - 5801
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
