Mechanical properties of homogeneous and nitrogen graded TiN thin films
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | English |
|---|---|
| Article number | 138268 |
| Pages (from-to) | 138268 |
| Number of pages | 1 |
| Journal | Thin solid films |
| Volume | 710 |
| DOIs | |
| Publication status | Published - 30 Sept 2020 |
