Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers
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Authors
Organisational units
External Organisational units
- PLANSEE SE
- Erich Schmid Institute of Materials Science
Abstract
Sputter deposited Mo/Al/Mo multilayers are widely used material systems for electrodes in display technologies. In this study, the electro-mechanical behavior of simplified bilayer versions was improved for flexible applications through substitution of the Mo by Mo-Ta alloy layers. Sputter deposited Al/Mo-Ta bilayers were tested under uniaxial tensile and cyclic bending loads. Compared to similar Al/Mo bilayers from previous studies, the Mo-Ta interlayer with 50 at.% Ta improved the crack onset strain under tensile load by more than 1% strain. Furthermore, after 50 000 cycles under 1.3% bending strain, the Al/Mo-Ta bilayers were nearly undamaged and experienced a relatively small electrical resistance increase of 25%, compared to Al/Mo bilayers, which were 40 to 100 times higher. This work shows that the substitution of the brittle Mo interlayer with a more ductile Mo-Ta interlayer can improve the performance and lifetime of the electrodes and is more suitable for flexible displays than the currently used materials.
Details
Original language | English |
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Article number | 138533 |
Number of pages | 9 |
Journal | Thin solid films |
Volume | 720.2021 |
Issue number | 28 February |
DOIs | |
Publication status | E-pub ahead of print - 9 Jan 2021 |