Parameters influencing the fracture of Mo films and their wider significance
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Authors
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- Erich Schmid Institute of Materials Science
Abstract
Fragmentation testing has been used for decades to assess thin film fracture and delamination. Hooke’s law is generally used to determine a film fracture stress from the crack onset strain observed in micrographs or measured as an electrical resistance increase. While this method is in theory suitable in the elastic regime, it neglects important film characteristics, such as residual stress, microstructure, or film architecture. Thus, there is a need to improve fracture analysis using fragmentation to avoid significant errors in measuring fracture stress or apparent fracture toughness of thin films. In-situ X-ray diffraction fragmentation experiments can measure the film fracture stress even for individual layers being part of a multilayer. Which characteristics influence the apparent fracture behavior will be demonstrated on Mo thin films on polyimide. Graphical abstract: [Figure not available: see fulltext.]
Details
Original language | English |
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Number of pages | 7 |
Journal | MRS Advances |
Volume | 8.2023 |
Issue number | July |
DOIs | |
Publication status | Published - 18 Jul 2023 |