Parameters influencing the fracture of Mo films and their wider significance
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In: MRS Advances, Vol. 8.2023, No. July, 18.07.2023.
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T1 - Parameters influencing the fracture of Mo films and their wider significance
AU - Cordill, Megan J.
AU - Kreiml, Patrice
AU - Jörg, Tanja
AU - Žák, Stanislav
AU - Mitterer, Christian
N1 - Publisher Copyright: © 2023, The Author(s).
PY - 2023/7/18
Y1 - 2023/7/18
N2 - Fragmentation testing has been used for decades to assess thin film fracture and delamination. Hooke’s law is generally used to determine a film fracture stress from the crack onset strain observed in micrographs or measured as an electrical resistance increase. While this method is in theory suitable in the elastic regime, it neglects important film characteristics, such as residual stress, microstructure, or film architecture. Thus, there is a need to improve fracture analysis using fragmentation to avoid significant errors in measuring fracture stress or apparent fracture toughness of thin films. In-situ X-ray diffraction fragmentation experiments can measure the film fracture stress even for individual layers being part of a multilayer. Which characteristics influence the apparent fracture behavior will be demonstrated on Mo thin films on polyimide. Graphical abstract: [Figure not available: see fulltext.]
AB - Fragmentation testing has been used for decades to assess thin film fracture and delamination. Hooke’s law is generally used to determine a film fracture stress from the crack onset strain observed in micrographs or measured as an electrical resistance increase. While this method is in theory suitable in the elastic regime, it neglects important film characteristics, such as residual stress, microstructure, or film architecture. Thus, there is a need to improve fracture analysis using fragmentation to avoid significant errors in measuring fracture stress or apparent fracture toughness of thin films. In-situ X-ray diffraction fragmentation experiments can measure the film fracture stress even for individual layers being part of a multilayer. Which characteristics influence the apparent fracture behavior will be demonstrated on Mo thin films on polyimide. Graphical abstract: [Figure not available: see fulltext.]
UR - http://www.scopus.com/inward/record.url?scp=85165171889&partnerID=8YFLogxK
U2 - 10.1557/s43580-023-00612-3
DO - 10.1557/s43580-023-00612-3
M3 - Article
VL - 8.2023
JO - MRS Advances
JF - MRS Advances
SN - 2059-8521
IS - July
ER -
