Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films
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| Translated title of the contribution | Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 403-409 |
| Journal | Thin solid films |
| Volume | 534 |
| DOIs | |
| Publication status | Published - 2013 |
