Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

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Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films. / Tritremmel, Christian; Daniel, Rostislav; Lechthaler, M et al.
In: Thin solid films, Vol. 534, 2013, p. 403-409.

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@article{43259137a4d447cfb76dc34c63c6ba37,
title = "Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films",
author = "Christian Tritremmel and Rostislav Daniel and M Lechthaler and P Pocik and Christian Mitterer",
year = "2013",
doi = "10.1016/j.tsf.2013.03.017",
language = "English",
volume = "534",
pages = "403--409",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

AU - Tritremmel, Christian

AU - Daniel, Rostislav

AU - Lechthaler, M

AU - Pocik, P

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

U2 - 10.1016/j.tsf.2013.03.017

DO - 10.1016/j.tsf.2013.03.017

M3 - Article

VL - 534

SP - 403

EP - 409

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -