Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology
Research output: Contribution to journal › Review article › peer-review
Authors
Organisational units
External Organisational units
- International Union for Vacuum Science, Technique and Applications, Avenue de la Renaissance 30, B-1000 Brussels, Belgium
- International Union of Vacuum Science, Technology and Applications (IUVSTA)
- Department of Mechanical Science & Engineering
- NIST, 100 Bureau Drive, Gaithersburg, MD 20899, USA
Details
| Original language | English |
|---|---|
| Pages (from-to) | 120-160 |
| Journal | Thin solid films |
| Volume | 660 |
| DOIs | |
| Publication status | Published - 30 Aug 2018 |
