Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
1 - 28 out of 28Page size: 50

Research output

  1. 2024
  2. Published

    Lead-free dielectric thin films: Synthesis of Ag(Nb1−xTax)O3 via reactive dc magnetron sputtering

    Kölbl, L., Mehrabi, M., Griesser, T., Munnik, F. & Mitterer, C., 6 Dec 2024, In: Journal of vacuum science & technology / A (JVST). 43.2024, 1, 11 p.

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study

    Knabl, F., Bandl, C., Griesser, T. & Mitterer, C., 17 Jan 2024, In: Journal of vacuum science & technology / A (JVST). 42.2024, 2, 10 p., 023201.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses

    Meindlhumer, M., Ziegelwanger, T., Grau, J., Sternschulte, H., Sztucki, M., Steinmüller-Nethl, D. & Keckes, J., 12 Jan 2024, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 42.2024, 2, 12 p., 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  5. 2023
  6. Published

    Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading

    Altaf Husain, S., Kreiml, P., Renault, P.-O., Mitterer, C., Cordill, M. J. & Faurie, D., 14 Mar 2023, In: Journal of vacuum science & technology / A (JVST). 41.2023, 3, 8 p., 033403.

    Research output: Contribution to journal › Article › Research › peer-review

  7. E-pub ahead of print

    Oxidation behavior of a cathodic arc evaporated Cr0.69Ta0.20B0.11N coating

    Kainz, C., Letofsky-Papst, I., Saringer, C., Krüger, H., Stark, A., Schell, N., Pohler, M. & Czettl, C., 1 Feb 2023, (E-pub ahead of print) In: Journal of vacuum science & technology / A (JVST). 41.2023, 2, 10 p., 023102.

    Research output: Contribution to journal › Article › Research › peer-review

  8. 2020
  9. Published

    Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

    Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 1 Sept 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 5, p. ´ 14 p., 053401.

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

    Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  11. 2018
  12. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journal › Article › Research › peer-review

  13. Published

    Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

    Xia, A., Glushko, O., Cordill, M. & Franz, R., 2018, In: Journal of vacuum science & technology / A (JVST). p. 010601-1-010601-4

    Research output: Contribution to journal › Article › Research › peer-review

  14. Published

    Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

    Saringer, C., Oberroither, C., Zorn, K., Franz, R. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, 2

    Research output: Contribution to journal › Article › Research › peer-review

  15. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journal › Article › Research › peer-review

  16. 2017
  17. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

  18. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 18 May 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6 p., 041504.

    Research output: Contribution to journal › Article › Research › peer-review

  19. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  20. 2016
  21. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  22. Published

    Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

    Franz, R., Mendez Martin, F., Hawranek, G. & Polcik, P., 2016, In: Journal of vacuum science & technology / A (JVST). Vol. 34, No. 2, p. 1-8 8 p.

    Research output: Contribution to journal › Article › Research › peer-review

  23. 2012
  24. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  25. 2011
  26. Published

    Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., Jul 2011, In: Journal of vacuum science & technology / A (JVST). 29, 4, 041506.

    Research output: Contribution to journal › Article › Research › peer-review

  27. Published

    Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., 2011, In: Journal of vacuum science & technology / A (JVST). p. 0415061-0415068

    Research output: Contribution to journal › Article › Research › peer-review

  28. 2010
  29. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

  30. 2009
  31. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

  32. 2008
  33. Published

    Oxidation and diffusion processes during annealing of AlCrVN hard coatings

    Franz, R., Neidhardt, J., Mitterer, C., Schaffer, B., Hutter, H., Kaindl, R., Sartory, B., Tessadri, R., Lechthaler, M. & Polcik, P., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 302-308

    Research output: Contribution to journal › Article › Research › peer-review

  34. Published

    Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

    Rovere, F. & Mayrhofer, P. H., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 29-35

    Research output: Contribution to journal › Article › Research › peer-review

  35. 2007
  36. Published

    Beyond b-C3-N4-Fullerene-like carbon nitride: A promising coating material

    Neidhardt, J. & Hultman, L., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 633-644

    Research output: Contribution to journal › Article › Research › peer-review

  37. Published

    Impact of Yttrium on structure and mechanical properties of Cr-Al-N thin films

    Rovere, F. & Mayrhofer, P. H., 2007, In: Journal of vacuum science & technology / A (JVST). 25, p. 1336-1340

    Research output: Contribution to journal › Article › Research › peer-review

  38. Published

    Oxidation of arc evaporated Al1-xCrxN coatings

    Reiter, A., Mitterer, C. & Sartory, B., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 711-720

    Research output: Contribution to journal › Article › Research › peer-review

  39. Published

    Thermal stability of sputtered intermetallic Al-Au coatings

    Moser, M., Mayrhofer, P. H., Rainforth, W. M. & Ross, I. M., 2007, In: Journal of vacuum science & technology / A (JVST). p. 1402-1406

    Research output: Contribution to journal › Article › Research › peer-review

  40. 2006
  41. Published

    Para-Sexiphenyl Thin Films Grown by Hot Wall Epitaxy on KCI(001)substrates

    Andreev, A., Montaigne, A., Hlawacek, G., Sitter, H. & Teichert, C., 2006, In: Journal of vacuum science & technology / A (JVST). 24, p. 1660-1663

    Research output: Contribution to journal › Article › Research › peer-review

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