Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- MIBA High Tech Coatings, Dr.-Mitterbauer-Strasse 3, 4655 Vorchdorf, Austria
Details
| Original language | English |
|---|---|
| Article number | 041517 |
| Number of pages | 8 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 34.2016 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1 Jul 2016 |
