Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres
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Original language | English |
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Pages (from-to) | 1-8 |
Number of pages | 8 |
Journal | Journal of vacuum science & technology / A (JVST) |
Volume | Vol. 34 |
Issue number | No. 2 |
DOIs | |
Publication status | Published - 2016 |