In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study
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Abstract
Magnetron sputter inert gas condensation was coupled with quadrupole mass spectrometry for the in situ characterization of a nanoparticle beam. The proposed method allows us to determine the size distribution and the mass flux of the nanoparticles. The measured quadrupole mass spectrometer grid current is converted into a nanoparticle flux and subsequently into a mass flux. Cu nanoparticles were deposited onto Si substrates using different filtering modes of the quadrupole mass spectrometer. Characterization was carried out using a combination of x-ray photoelectron spectroscopy and scanning electron microscopy. Quantitative analysis of the elemental composition of the Si surface revealed a Gaussian distribution of the deposited nanoparticles over the diameter of the rotating substrate holder with a good quantitative agreement with the predictions made from the in situ quantification method.
Details
Original language | English |
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Article number | 023201 |
Number of pages | 10 |
Journal | Journal of vacuum science & technology / A (JVST) |
Volume | 42.2024 |
Issue number | 2 |
DOIs | |
Publication status | Published - 17 Jan 2024 |