Impact of Yttrium on structure and mechanical properties of Cr-Al-N thin films
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| Translated title of the contribution | Impact of Yttrium on structure and mechanical properties of Cr-Al-N thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 1336-1340 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 25 |
| DOIs | |
| Publication status | Published - 2007 |
