Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
1 - 10 out of 26Page size: 10

Research output

  1. 2024
  2. Published

    In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study

    Knabl, F., Bandl, C., Griesser, T. & Mitterer, C., 17 Jan 2024, In: Journal of vacuum science & technology / A (JVST). 42.2024, 2, 10 p., 023201.

    Research output: Contribution to journal › Article › Research › peer-review

  3. 2023
  4. Published

    Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading

    Altaf Husain, S., Kreiml, P., Renault, P-O., Mitterer, C., Cordill, M. J. & Faurie, D., 14 Mar 2023, In: Journal of vacuum science & technology / A (JVST). 41.2023, 3, 8 p., 033403.

    Research output: Contribution to journal › Article › Research › peer-review

  5. E-pub ahead of print

    Oxidation behavior of a cathodic arc evaporated Cr0.69Ta0.20B0.11N coating

    Kainz, C., Letofsky-Papst, I., Saringer, C., Krüger, H., Stark, A., Schell, N., Pohler, M. & Czettl, C., 1 Feb 2023, (E-pub ahead of print) In: Journal of vacuum science & technology / A (JVST). 41.2023, 2, 10 p., 023102.

    Research output: Contribution to journal › Article › Research › peer-review

  6. 2020
  7. Published

    Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

    Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 1 Sept 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 5, p. ´ 14 p., 053401.

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

    Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  9. 2018
  10. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journal › Article › Research › peer-review

  11. Published

    Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

    Xia, A., Glushko, O., Cordill, M. & Franz, R., 2018, In: Journal of vacuum science & technology / A (JVST). p. 010601-1-010601-4

    Research output: Contribution to journal › Article › Research › peer-review

  12. Published

    Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

    Saringer, C., Oberroither, C., Zorn, K., Franz, R. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, 2

    Research output: Contribution to journal › Article › Research › peer-review

  13. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journal › Article › Research › peer-review

  14. 2017
  15. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

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