Journal of vacuum science & technology / A (JVST), 0734-2101
Journal
| ISSNs | 0734-2101 |
|---|
1 - 10 out of 27Page size: 10
Research output
- 2024
- Published
In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study
Knabl, F., Bandl, C., Griesser, T. & Mitterer, C., 17 Jan 2024, In: Journal of vacuum science & technology / A (JVST). 42.2024, 2, 10 p., 023201.Research output: Contribution to journal › Article › Research › peer-review
- Published
Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses
Meindlhumer, M., Ziegelwanger, T., Grau, J., Sternschulte, H., Sztucki, M., Steinmüller-Nethl, D. & Keckes, J., 12 Jan 2024, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2024, 42, 12 p., 023401.Research output: Contribution to journal › Article › Research › peer-review
- 2023
- Published
Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading
Altaf Husain, S., Kreiml, P., Renault, P-O., Mitterer, C., Cordill, M. J. & Faurie, D., 14 Mar 2023, In: Journal of vacuum science & technology / A (JVST). 41.2023, 3, 8 p., 033403.Research output: Contribution to journal › Article › Research › peer-review
- E-pub ahead of print
Oxidation behavior of a cathodic arc evaporated Cr0.69Ta0.20B0.11N coating
Kainz, C., Letofsky-Papst, I., Saringer, C., Krüger, H., Stark, A., Schell, N., Pohler, M. & Czettl, C., 1 Feb 2023, (E-pub ahead of print) In: Journal of vacuum science & technology / A (JVST). 41.2023, 2, 10 p., 023102.Research output: Contribution to journal › Article › Research › peer-review
- 2020
- Published
Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects
Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 1 Sept 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 5, p. ´ 14 p., 053401.Research output: Contribution to journal › Article › Research › peer-review
- Published
Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target
Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.Research output: Contribution to journal › Article › Research › peer-review
- 2018
- Published
Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.Research output: Contribution to journal › Article › Research › peer-review
- Published
Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates
Xia, A., Glushko, O., Cordill, M. & Franz, R., 2018, In: Journal of vacuum science & technology / A (JVST). p. 010601-1-010601-4Research output: Contribution to journal › Article › Research › peer-review
- Published
Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
Saringer, C., Oberroither, C., Zorn, K., Franz, R. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, 2Research output: Contribution to journal › Article › Research › peer-review
- Published
Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5Research output: Contribution to journal › Article › Research › peer-review
