Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
Details
| Translated title of the contribution | Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings |
|---|---|
| Original language | English |
| Pages (from-to) | 0415061-0415068 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Publication status | Published - 2011 |
