Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
Research output: Contribution to journal › Article › Research › peer-review
Standard
Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings. / Edlmayr, Viktoria; Harzer, T.P.; Hoffmann, R. et al.
In: Journal of vacuum science & technology / A (JVST), 2011, p. 0415061-0415068.
In: Journal of vacuum science & technology / A (JVST), 2011, p. 0415061-0415068.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Edlmayr, V, Harzer, TP, Hoffmann, R, Kiener, D, Scheu, C & Mitterer, C 2011, 'Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings', Journal of vacuum science & technology / A (JVST), pp. 0415061-0415068.
APA
Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C., & Mitterer, C. (2011). Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings. Journal of vacuum science & technology / A (JVST), 0415061-0415068.
Vancouver
Edlmayr V, Harzer TP, Hoffmann R, Kiener D, Scheu C, Mitterer C. Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings. Journal of vacuum science & technology / A (JVST). 2011;0415061-0415068.
Author
Bibtex - Download
@article{b0f3fe8e259348a5b391b704e804dc77,
title = "Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings",
author = "Viktoria Edlmayr and T.P. Harzer and R. Hoffmann and Daniel Kiener and C. Scheu and Christian Mitterer",
year = "2011",
language = "English",
pages = "0415061--0415068",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
AU - Edlmayr, Viktoria
AU - Harzer, T.P.
AU - Hoffmann, R.
AU - Kiener, Daniel
AU - Scheu, C.
AU - Mitterer, Christian
PY - 2011
Y1 - 2011
M3 - Article
SP - 415061
EP - 415068
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -
