Thermal stability of sputtered intermetallic Al-Au coatings
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Thermal stability of sputtered intermetallic Al-Au coatings |
|---|---|
| Original language | English |
| Pages (from-to) | 1402-1406 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| DOIs | |
| Publication status | Published - 2007 |
