Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- MIBA High Tech Coatings, Dr.-Mitterbauer-Strasse 3, 4655 Vorchdorf, Austria
Details
| Original language | English |
|---|---|
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 36 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2018 |
