Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Research output: Contribution to journal › Article › Research › peer-review
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- PLANSEE SE
Details
| Original language | English |
|---|---|
| Pages (from-to) | 021513-1-021513-5 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 36 |
| DOIs | |
| Publication status | Published - 2018 |
