Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Ludwig-Maximilians-University
Details
| Original language | English |
|---|---|
| Article number | 041506 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 29 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Jul 2011 |
