Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Applied Physics
- PLANSEE SE
Details
Original language | English |
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Article number | 021504 |
Number of pages | 8 |
Journal | Journal of vacuum science & technology / A (JVST) |
Volume | 35.2017 |
Issue number | 2 |
DOIs | |
Publication status | Published - 4 Jan 2017 |