Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • Aitana Tarazaga Martin-Luengo
  • Enrico Franzke
  • Harald Köstenbauer
  • Jörg Winkler
  • Alberta Bonanni

External Organisational units

  • Institute of Applied Physics
  • PLANSEE SE

Details

Original languageEnglish
Article number021504
Number of pages8
JournalJournal of vacuum science & technology / A (JVST)
Volume35.2017
Issue number2
DOIs
Publication statusPublished - 4 Jan 2017