Investigation on structure and properties of arc-evaporated HfAIN hard coatings

Research output: Contribution to journalArticleResearchpeer-review

Details

Translated title of the contributionInvestigation on structure and properties of arc-evaporated HfAIN hard coatings
Original languageEnglish
Pages (from-to)528-535
JournalJournal of vacuum science & technology / A (JVST)
Publication statusPublished - 2010