Investigation on structure and properties of arc-evaporated HfAIN hard coatings
Research output: Contribution to journal › Article › Research › peer-review
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Investigation on structure and properties of arc-evaporated HfAIN hard coatings. / Franz, Robert; Mitterer, Christian; Lechthaler, Markus et al.
In: Journal of vacuum science & technology / A (JVST), 2010, p. 528-535.
In: Journal of vacuum science & technology / A (JVST), 2010, p. 528-535.
Research output: Contribution to journal › Article › Research › peer-review
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Bibtex - Download
@article{f0dd464b6d40433f88c5be5e67ed00c6,
title = "Investigation on structure and properties of arc-evaporated HfAIN hard coatings",
author = "Robert Franz and Christian Mitterer and Markus Lechthaler and Conrad Polzer",
year = "2010",
language = "English",
pages = "528--535",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Investigation on structure and properties of arc-evaporated HfAIN hard coatings
AU - Franz, Robert
AU - Mitterer, Christian
AU - Lechthaler, Markus
AU - Polzer, Conrad
PY - 2010
Y1 - 2010
M3 - Article
SP - 528
EP - 535
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -
