Investigation on structure and properties of arc-evaporated HfAIN hard coatings

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{f0dd464b6d40433f88c5be5e67ed00c6,
title = "Investigation on structure and properties of arc-evaporated HfAIN hard coatings",
author = "Robert Franz and Christian Mitterer and Markus Lechthaler and Conrad Polzer",
year = "2010",
language = "English",
pages = "528--535",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",

}

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TY - JOUR

T1 - Investigation on structure and properties of arc-evaporated HfAIN hard coatings

AU - Franz, Robert

AU - Mitterer, Christian

AU - Lechthaler, Markus

AU - Polzer, Conrad

PY - 2010

Y1 - 2010

M3 - Article

SP - 528

EP - 535

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

ER -